Deconvolution of SIMS Depth Profiles of Boron in Silicon

The use of nuclear reactions and SIMS for quantitative depth profiling of hydrogen in amorphous silicon

Sputter Depth Profiling by SIMS; Calibration of SIMS Depth Scale Using Multi-layer Reference Materials

In-depth distribution of doping elements in shallow depth region is an important role of secondary ion mass spectrometry (SIMS) for the development of next-generation semiconductor devices. KRISS has developed two types of multi-layer reference materials by ion beam sputter deposition. A multiple delta-layer reference material where the layers of one element are very thin can be used to evaluat...

Vacancy and interstitial depth profiles in ion-implanted silicon

An experimental method of studying shifts between concentration-versus-depth profiles of vacancyand interstitial-type defects in ion-implanted silicon is demonstrated. The concept is based on deep level transient spectroscopy measurements utilizing the filling pulse variation technique. The vacancy profile, represented by the vacancy–oxygen center, and the interstitial profile, represented by t...

Steady-State Statistical SputteringModel for Extracting Depth Profiles from Molecular Dynamics Simulations of Dynamic SIMS

Steady-State Statistical SputteringModel for Extracting Depth Profiles from Molecular Dynamics Simulations of Dynamic SIMS Robert J. Paruch, Zbigniew Postawa, Andreas Wucher, and Barbara J. Garrison* Smoluchowski Institute of Physics, Jagiellonian University, Ulica Reymonta 4, 30-059 Krak ow, Poland Faculty of Physics, University of Duisburg-Essen, 47048 Duisburg, Germany Department of Chemistr...

the effect of the utilization of electronic dictionaries on depth and breadth of vocabulary knowledge: a case of iranian efl learners

مطالعه حاضر تلاشی است برای بررسی تأثیرات به کارگیری فرهنگ لغات ، یکی از مهمترین ابزارهای یادگیری واژگان درفراگیری زبان خارجی، بر روی دانش لغوی. دراین تحقیق فرهنگ های الکترونیکی در قیاس با فرهنگ های چاپی مورد بررسی قرارگرفته اند که آیا این فرهنگ ها تاثیرقابل توجهی بر روی دوبعد کمی و کیفی دانش لغوی یعنی عمق و گستره لغات می گذارند. همچنین مشخص گردیده است که آیا تفاوت قابل ملاحظه ای میان عمق و گستر...